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1

Electronic materials surface processing with excimer lasers

David J. Elliott, Bernhard P. Piwczyk

Journal:

Microelectronic Engineering

Year:

1986

Language:

english

File:

PDF, 490 KB

english, 1986

2

SPIE Proceedings [SPIE O-E/Fiber LASE '88 - Boston, MA (Tuesday 6 September 1988)] Excimer Beam Applications - Improved Beam Uniformity In Excimer Lasers

Sowada, U., Sercel, J., Kahlert, H. J., Basting, D., Austin, L., Pirri, Anthony N., Piwczyk, Bernhard P.

Year:

1988

Language:

english

File:

PDF, 113 KB

english, 1988

3

SPIE Proceedings [SPIE Boston - DL tentative - Boston, MA (Tuesday 25 September 1990)] Excimer Laser Materials Processing and Beam Delivery Systems - Excimer lasers for deep-UV lithography

Elliott, David J., Sengupta, Uday K., Piwczyk, Bernhard P.

Year:

1991

Language:

english

File:

PDF, 512 KB

english, 1991

4

SPIE Proceedings [SPIE O-E/Fiber LASE '88 - Boston, MA (Tuesday 6 September 1988)] Excimer Beam Applications - Excimer-Laser Spectroscopy Of Polymeric Materials

Rodgers, A. L., Ahmad, S. R., Pirri, Anthony N., Piwczyk, Bernhard P.

Year:

1988

Language:

english

File:

PDF, 241 KB

english, 1988

5

SPIE Proceedings [SPIE O-E/Fiber LASE '88 - Boston, MA (Tuesday 6 September 1988)] Excimer Beam Applications - KrF Laser Induced Color Centers In Commercial Fused Silicas

Escher, Gary C., Pirri, Anthony N., Piwczyk, Bernhard P.

Year:

1988

Language:

english

File:

PDF, 681 KB

english, 1988

6

Single & Multiple Pulse Ablation of Polymeric and High Density Materials with Excimer Laser Radiation at 193NM and 248NM

Elliott, David J., Piwczyk, Ernhard P., Elliott, David J., Piwczyk, Bernhard P.

Journal:

MRS Proceedings

Year:

1988

Language:

english

File:

PDF, 2.01 MB

english, 1988

7

SPIE Proceedings [SPIE O-E/Fiber LASE '88 - Boston, MA (Tuesday 6 September 1988)] Excimer Beam Applications - XeCl Laser Ablation Of Organic Polymers: Characterization Of Debris And Its Effect On Surface Morphology

Singleton, Donald L., Paraskevopoulos, George, Irwin, Robert S., Taylor, Roderick S., Leopold, Kurt E., Pirri, Anthony N., Piwczyk, Bernhard P.

Year:

1988

Language:

english

File:

PDF, 8.36 MB

english, 1988

8

Materials Surface Processing with Excimer Lasers

Elliott, David J., Piwczyk, Bernhard P.

Journal:

MRS Proceedings

Year:

1986

Language:

english

File:

PDF, 690 KB

english, 1986

9

SPIE Proceedings [SPIE Boston - DL tentative - Boston, MA (Tuesday 25 September 1990)] Excimer Laser Materials Processing and Beam Delivery Systems - Progress in gas purifiers for industrial excimer lasers

Naylor, Graham A., Kearsley, Andrew J., Piwczyk, Bernhard P.

Year:

1991

Language:

english

File:

PDF, 142 KB

english, 1991

10

SPIE Proceedings [SPIE Boston - DL tentative - Boston, MA (Tuesday 25 September 1990)] Excimer Laser Materials Processing and Beam Delivery Systems - Coating development for high-energy KrF excimer lasers

Boyer, James D., Mauro, Billie R., Sanders, Virgil E., Piwczyk, Bernhard P.

Year:

1991

Language:

english

File:

PDF, 225 KB

english, 1991

11

SPIE Proceedings [SPIE Microlithography Conference - Santa Clara, CA (Monday 2 March 1987)] Lasers in Microlithography - Photoablation Of Resist Coated Alignment Targets To Improve VLSI Pattern Overlay

Elliott, David J., Polasko, Kenneth J., Piwczyk, Bernhard P., Balch, Ernest W., Batchelder, John S., Ehrlich, Daniel J., Tsao, Jeff Y.

Year:

1987

Language:

english

File:

PDF, 5.45 MB

english, 1987

12

SPIE Proceedings [SPIE O-E/Fiber LASE '88 - Boston, MA (Tuesday 6 September 1988)] Excimer Beam Applications - A Versatile Excimer Laser Processing System

Poulin, G . D., Eisele, Peter A., Pirri, Anthony N., Piwczyk, Bernhard P.

Year:

1988

Language:

english

File:

PDF, 11.56 MB

english, 1988

13

SPIE Proceedings [SPIE Boston - DL tentative - Boston, MA (Tuesday 25 September 1990)] Excimer Laser Materials Processing and Beam Delivery Systems - Dose control for short exposures in excimer laser lithography

Hollman, Richard F., Piwczyk, Bernhard P.

Year:

1991

Language:

english

File:

PDF, 325 KB

english, 1991

14

SPIE Proceedings [SPIE 1988 Los Angeles Symposium--O-E/LASE '88 - Los Angeles, CA (Monday 11 January 1988)] Gas Laser Technology - Materials Surface Processing With Excimer Lasers

Elliott, David J., Piwczyk, Bernhard P., Chenausky, Peter P., Sauerbrey, Roland A., Tillotson, James H.

Year:

1988

Language:

english

File:

PDF, 4.99 MB

english, 1988

15

SPIE Proceedings [SPIE Boston - DL tentative - Boston, MA (Tuesday 25 September 1990)] Excimer Laser Materials Processing and Beam Delivery Systems - Total internal reflection mirrors fabricated in polymeric optical waveguides via excimer laser ablation

Trewhella, Jeannine M., Oprysko, Modest M., Piwczyk, Bernhard P.

Year:

1991

Language:

english

File:

PDF, 1.01 MB

english, 1991

16

SPIE Proceedings [SPIE O-E/Fiber LASE '88 - Boston, MA (Tuesday 6 September 1988)] Excimer Beam Applications - Assisted Arf Excimer Photo-Etching Of Mercury Cadmium Telluride (MGT) Semiconductor

Azema, Alain, Botineau, Jean, Gaucherel, Philippe, Roustan, Jean-Claude, Pirri, Anthony N., Piwczyk, Bernhard P.

Year:

1988

Language:

english

File:

PDF, 4.11 MB

english, 1988

17

SPIE Proceedings [SPIE O-E/Fiber LASE '88 - Boston, MA (Tuesday 6 September 1988)] Excimer Beam Applications - Industrial Microprocessing Applications Of Excimer Lasers

Sercel, J., Sowada, U., Kahlert, H J., Basting, D., Austin, L., Pirri, Anthony N., Piwczyk, Bernhard P.

Year:

1988

Language:

english

File:

PDF, 280 KB

english, 1988

18

SPIE Proceedings [SPIE O-E/Fiber LASE '88 - Boston, MA (Tuesday 6 September 1988)] Excimer Beam Applications - Excimer Laser Light Delivery System For Micromachining

Harte, K . J., Piwczyk, B. P., Pirri, Anthony N., Piwczyk, Bernhard P.

Year:

1988

Language:

english

File:

PDF, 6.50 MB

english, 1988

19

SPIE Proceedings [SPIE O-E/Fiber LASE '88 - Boston, MA (Tuesday 6 September 1988)] Excimer Beam Applications - Excimer Laser Curing Of Polymer Coatings

Klick, David, Akerman, M. Alfred, Paul, George L., Supurovic, Darko, Tsuda, Haruki, Pirri, Anthony N., Piwczyk, Bernhard P.

Year:

1988

Language:

english

File:

PDF, 678 KB

english, 1988

20

SPIE Proceedings [SPIE Boston - DL tentative - Boston, MA (Tuesday 25 September 1990)] Excimer Laser Materials Processing and Beam Delivery Systems - Excimer laser micromachining for passive fiber coupling to polymeric waveguide devices

Booth, Bruce L., Hohman, James L., Keating, Kenneth B., Marchegiano, Joseph E., Witman, Sandy L., Piwczyk, Bernhard P.

Year:

1991

Language:

english

File:

PDF, 598 KB

english, 1991

21

SPIE Proceedings [SPIE Boston - DL tentative - Boston, MA (Tuesday 25 September 1990)] Excimer Laser Materials Processing and Beam Delivery Systems - Excimer laser fabrication of waveguide devices

Stiller, Marc A., Piwczyk, Bernhard P.

Year:

1991

Language:

english

File:

PDF, 508 KB

english, 1991

22

SPIE Proceedings [SPIE O-E/Fiber LASE '88 - Boston, MA (Tuesday 6 September 1988)] Excimer Beam Applications - Narrow-Band KrF Excimer Laser -- Tunable And Wavelength Stabilized

Wani, Koich, Ogata, Yoshiro, Watarai, Yoshiaki, Ono, Takuhiro, Miyata, Takeo, Sano, Reiji, Terui, Yasuaki, Pirri, Anthony N., Piwczyk, Bernhard P.

Year:

1988

Language:

english

File:

PDF, 2.48 MB

english, 1988

23

SPIE Proceedings [SPIE O-E/Fiber LASE '88 - Boston, MA (Tuesday 6 September 1988)] Excimer Beam Applications - A Deep UV Imaging System For Lithography And Process Development

Michaloski, Paul, Dewa, Paul, Pirri, Anthony N., Piwczyk, Bernhard P.

Year:

1988

Language:

english

File:

PDF, 270 KB

english, 1988

24

SPIE Proceedings [SPIE Boston - DL tentative - Boston, MA (Tuesday 25 September 1990)] Excimer Laser Materials Processing and Beam Delivery Systems - Photoablative etching of materials for optoelectronic integrated devices

Lemoine, Patrick, Magan, John D., Blau, Werner J., Piwczyk, Bernhard P.

Year:

1991

Language:

english

File:

PDF, 472 KB

english, 1991

25

SPIE Proceedings [SPIE Boston - DL tentative - Boston, MA (Tuesday 25 September 1990)] Excimer Laser Materials Processing and Beam Delivery Systems - Pulsed-laser deposition of oxides over large areas

Greer, James A., Van Hook, H. J., Piwczyk, Bernhard P.

Year:

1991

Language:

english

File:

PDF, 922 KB

english, 1991

26

SPIE Proceedings [SPIE Boston - DL tentative - Boston, MA (Tuesday 25 September 1990)] Excimer Laser Materials Processing and Beam Delivery Systems - Producing a uniform excimer laser beam for materials processing applications

Bunis, Jenifer L., Abele, Chris C., Campbell, James D., Caudle, George F., Piwczyk, Bernhard P.

Year:

1991

Language:

english

File:

PDF, 469 KB

english, 1991

27

SPIE Proceedings [SPIE Boston - DL tentative - Boston, MA (Tuesday 25 September 1990)] Excimer Laser Materials Processing and Beam Delivery Systems - What industry needs in a high-power excimer laser

Lankard, Sr., John R., Piwczyk, Bernhard P.

Year:

1991

Language:

english

File:

PDF, 368 KB

english, 1991

28

SPIE Proceedings [SPIE O-E/Fiber LASE '88 - Boston, MA (Tuesday 6 September 1988)] Excimer Beam Applications - Excimer Laser Induced Chemical Etching Of Silicon With Halogen-Containing Gases

Sesselmann, W., Bachmann, F., Pirri, Anthony N., Piwczyk, Bernhard P.

Year:

1988

Language:

english

File:

PDF, 494 KB

english, 1988

29

SPIE Proceedings [SPIE Boston - DL tentative - Boston, MA (Tuesday 25 September 1990)] Excimer Laser Materials Processing and Beam Delivery Systems - Applications of excimer lasers to combustion research

Davis, Steven J., Allen, Mark G., Piwczyk, Bernhard P.

Year:

1991

Language:

english

File:

PDF, 272 KB

english, 1991

30

SPIE Proceedings [SPIE Boston - DL tentative - Boston, MA (Tuesday 25 September 1990)] Excimer Laser Materials Processing and Beam Delivery Systems - Gas handling technology for excimer lasers

Turner, Robert E., Remo, John L., Bradford, Elaine, Dietz, Alvin, Piwczyk, Bernhard P.

Year:

1991

Language:

english

File:

PDF, 449 KB

english, 1991

31

SPIE Proceedings [SPIE O-E/Fiber LASE '88 - Boston, MA (Tuesday 6 September 1988)] Excimer Beam Applications - Incorporating Beam Diagnostics Into UV Laser Delivery Systems

Telfair, W . B. .., Yoder, Jr., P. R., Martin, C. A., Labinger, R. L., Fricke, W. C., Pirri, Anthony N., Piwczyk, Bernhard P.

Year:

1988

Language:

english

File:

PDF, 3.14 MB

english, 1988

32

SPIE Proceedings [SPIE O-E/Fiber LASE '88 - Boston, MA (Tuesday 6 September 1988)] Excimer Beam Applications - Laser-Induced Forward Transfer Of Metal Oxides To Trim The Frequency Of Surface Acoustic Wave Resonator Devices

Greer, James A., Parker, Thomas E., Pirri, Anthony N., Piwczyk, Bernhard P.

Year:

1988

Language:

english

File:

PDF, 5.32 MB

english, 1988

33

SPIE Proceedings [SPIE Boston - DL tentative - Boston, MA (Tuesday 25 September 1990)] Excimer Laser Materials Processing and Beam Delivery Systems - Novel excimer laser beam delivery technique using binary masks

Liu, Yung-Sheng, Levinson, Rosalie M., Rose, J. W., Piwczyk, Bernhard P.

Year:

1991

Language:

english

File:

PDF, 238 KB

english, 1991

34

SPIE Proceedings [SPIE O-E/Fiber LASE '88 - Boston, MA (Tuesday 6 September 1988)] Excimer Beam Applications - Advances In Excimer Laser Materials Processing

Poulin, G. Darcy, Eisele, Peter A., Pirri, Anthony N., Piwczyk, Bernhard P.

Year:

1988

Language:

english

File:

PDF, 11.33 MB

english, 1988

35

SPIE Proceedings [SPIE Boston - DL tentative - Boston, MA (Tuesday 25 September 1990)] Excimer Laser Materials Processing and Beam Delivery Systems - Large-scale industrial application for excimer lasers: via-hole-drilling by photoablation

Bachmann, Friedrich G., Piwczyk, Bernhard P.

Year:

1991

Language:

english

File:

PDF, 857 KB

english, 1991

36

SPIE Proceedings [SPIE O-E/Fiber LASE '88 - Boston, MA (Tuesday 6 September 1988)] Excimer Beam Applications - Bright Photoelectron Beams Emitted From Excimer-Laser Illuminated LaB6

Oettinger, Peter E., Pirri, Anthony N., Piwczyk, Bernhard P.

Year:

1988

Language:

english

File:

PDF, 1.51 MB

english, 1988

37

SPIE Proceedings [SPIE O-E/Fiber LASE '88 - Boston, MA (Tuesday 6 September 1988)] Excimer Beam Applications - Focussed Excimer Laser Beams: A Technique For Selective Micropatterning

Hagerhorst, Jean M., Oprysko, Modest M., Pirri, Anthony N., Piwczyk, Bernhard P.

Year:

1988

Language:

english

File:

PDF, 14.91 MB

english, 1988

38

SPIE Proceedings [SPIE Boston - DL tentative - Boston, MA (Tuesday 25 September 1990)] Excimer Laser Materials Processing and Beam Delivery Systems - Absorption behavior of ceramic materials irradiated with excimer lasers

Toenshoff, Hans K., Gedrat, Olaf, Piwczyk, Bernhard P.

Year:

1991

Language:

english

File:

PDF, 854 KB

english, 1991